2025-12-10 - Substrate Processing Equipment Shipments

Critical subsystem shipments and ASPs surged in Q3 2025, fueled by strong demand for lithography, deposition, and etch tools across major sectors.

This report reviews both top-line and segmented shipped units and ASPs for Critical subsystems (CSUBs) and breaks them down by industry, tool type, SEMI, FPD, and PV. We collect data throughout the year on public companies and analyze over 160 total companies that supply the subsystem market. Our analysis process combines historical data, econometric modeling, bottom-up and top-down supply chain analysis, industry interviews, and analyst expertise. This report focuses on yearly and quarterly substrate process equipment shipments and ASPs, which include lithography, CMP & ion implant, deposition, and etch & clean tool units.