onsemi Automotive M3S EliteSiC 1200V SiC Process Flow Analysis
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This report provides an analysis of the process flow and integration used in the manufacture of the onsemi NVH4L022N120M3S Automotive M3S EliteSiC 1200 V 22 mΩ N-Channel SiC Power MOSFET module. The module is optimized for automotive on-board chargers and DC-DC converters for EV/HEV. The spreadsheet lists the hundreds of process flow steps required in its manufacture.