Qorvo EG9381 Bulk Acoustic Wave Solidly Mounted Resonator (BAW-SMR) Filter Die Acoustic Wave Filter Process Analysis
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This report presents a process analysis (AFB) of the Qorvo EG9381 Bulk Acoustic Wave Solidly Mounted Resonator (BAW-SMR) Filter Die from the Qorvo QPQ5600 Band-Pass Filter. The EG9381 die, which is the target of this report, is fabricated on a silicon substrate, and features filter structures that are realized with piezoelectric scandium (Sc) doped aluminum nitride (AlN) membrane sandwiched between tungsten (W) electrodes. There are Bragg reflector structures below the piezoelectric and electrode layers for acoustic confinement.
