Glossary of Key Terms Related to Semiconductor Sustainability and Green Tech

The combination of semiconductor manufacturing and supply chains, and a focus on sustainability and operational efficiency has given rise to a slew of new terms and concepts that sustainability practitioners will frequently encounter in reports, industry presentations, and expert analysis. The following are definitions of some of the most frequently used terms related to semiconductor sustainability.

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Top 10 Terms

Carbon Footprint: A measure of the amount of carbon dioxide and other carbon compounds emitted due to the consumption of fossil fuels by a particular product, person, etc. Typically reported in carbon dioxide or carbon equivalents (CO2e).

Circular Economy: An economic system aimed at eliminating waste and the continual use of resources, emphasizing reuse, repair, and recycling

Energy Efficiency: Using less energy to provide the same level of energy service, reducing energy consumption and associated environmental impacts

Green Tech: Technology designed to minimize environmental impact, including renewable energy, energy efficiency, and pollution reduction technologies

Life Cycle Assessment (LCA): The combined emissions from the sourcing, production, use, and end-of-life of a product. In this case an electronic product (e.g., mobile phone, electric vehicle, server, etc.).

Scope 1 Emissions: Direct greenhouse gas (GHG) emissions that occur from sources that are controlled or owned by a fab (for example, emissions associated with wafer fabrication such as process chemicals used, fuel combustion for pumps, power, etc.)

Scope 2 Emissions: Indirect greenhouse gas (GHG) emissions associated with the purchase of electricity, steam, heating, and cooling

Scope 3 Emissions: Greenhouse gas (GHG) emissions associated with activities not owned or controlled by the fab, such as emissions generated by the sourcing of raw materials required by the fab

Ultrapure Water (UPW): Very highly purified water with extremely low levels of contaminants. Essential for semiconductor manufacturing

Water Footprint: The total volume of freshwater used to produce the goods and services consumed by an individual or community.

Definitions for Additional Sustainability Terms Used in the Semiconductor Industry

Abatement: Actions taken to reduce or eliminate emissions or pollution

Biodegradable: Capable of being decomposed by bacteria or other living organisms

Bioplastics: Plastics derived from renewable biomass sources, such as vegetable fats and oils, corn starch, or microbiota

Carbon Accounting: Also known as greenhouse gas (GHG) accounting. It is the process of measuring and tracking the amount of greenhouse gases that a facility or process emits. Essentially, it's about quantifying a "carbon footprint."

Carbon Capture and Storage (CCS): The process of capturing carbon dioxide emissions from industrial sources and storing them underground

Carbon Intensity: The amount of carbon emissions per unit of output or energy

Carbon Neutrality: Achieving a balance between carbon emissions and carbon removal, often through carbon offsets

Carbon Offsetting: Compensating for carbon emissions by funding an equivalent carbon dioxide saving elsewhere

Chemically Amplified Resists (CARs): Photoresists used in photolithography that are highly sensitive to light

Chiplet Technology: A modular approach to chip design, where integrated circuits (ICs) are constructed from smaller, interconnected components (chiplets)

Closed-Loop Recycling: Recycling a product into the same product, reducing the need for virgin materials

Cradle-to-Grave Analysis: Also known as life cycle assessment (LCA), the combined emissions from the sourcing, production, use, and end-of-life of a product.

Data Center Efficiency: Optimizing energy consumption and cooling in data centers to reduce environmental impact

Eco-design: Designing products and services with environmental considerations in mind from the outset

Environmental Justice: The fair treatment and meaningful involvement of all people regardless of race, color, national origin, or income with respect to the development, implementation, and enforcement of environmental laws, regulations, and policies

Environmental Regulations: Rules and laws designed to protect the environment

ESG (Environmental, Social, and Governance): A set of standards for a company’s operations that socially conscious investors use to screen potential investments

EUV Lithography: Extreme ultraviolet lithography (EUV) is an advanced technology used in the semiconductor industry for manufacturing leading-edge integrated circuits (7nm-3nm logic and 1α and 1β DRAM)

E-waste (Electronic Waste): Discarded electrical or electronic devices and components

Green Building: Designing, constructing, and operating buildings in an environmentally sustainable way

Greenwashing: The practice of making unsubstantiated or misleading claims about the environmental benefits of a product, service, or company

High Bandwidth Memory (HBM): A high-performance computer memory technology used in conjunction with high-performance graphics processing units and network devices

High-NA EUV Lithography: A next-generation EUV technology for chip manufacturing that enables higher resolution and smaller transistors.

Industrial Ecology: The study of industrial systems and their interactions with the environment

Impact Assessment: Evaluating the potential environmental and social impacts of a project or policy

Manufacturing Carbon Module: A tool used to calculate the carbon emissions produced during semiconductor manufacturing

Multi-Chip Module (MCM): An electronic assembly in which multiple integrated circuits (ICs) and other discrete components are integrated, usually onto a unifying substrate

Net-Zero Emissions: Achieving a balance between emissions produced and emissions removed from the atmosphere

Operational Efficiency: The ratio of useful output to total input in any process. In the case of sustainability, the optimization of processes to reduce waste and energy consumption

PFAS (Per- and Polyfluoroalkyl Substances): A group of man-made chemicals that are persistent in the environment and have potential adverse health effects

Photolithography: A process used in semiconductor manufacturing to transfer a pattern onto a silicon wafer using light

Process Node: a designation used to indicate the technology generation of a process

Product Carbon Footprint (PCF): Also known as Emissions Carbon Footprint (ECF), this is the sum of emissions across four key lifecycle stages of the product namely -- manufacturing, transportation, use, and end-of-llfe.

Reclamation: The process of returning land or resources to a usable state

Renewable Energy: Energy derived from natural processes that are replenished at a higher rate than they are consumed, such as solar, wind, and hydropower

Resource Depletion: The consumption of non-renewable resources faster than they can be replenished

Silicon Intensity: The amount of silicon used in semiconductor devices, impacting resource consumption and emissions

Supply Chain Transparency: Providing clear and accessible information about the environmental and social impacts of a company's supply chain

Sustainable Development Goals (SDGs): A collection of 17 interlinked global goals designed to be a "blueprint to achieve a better and more sustainable future for all"

Sustainable Investing: Investing in companies and projects that have a positive environmental and social impact

Sustainable Materials: Materials that have a lower environmental impact throughout their life cycle

Sustainable Packaging: Packaging designed to minimize environmental impact, often using recycled or biodegradable materials

Water Recycling: Treating and reusing wastewater for beneficial purposes

Expanded Glossary

Top 100 frequently used terms related to semiconductor sustainability, organized by areas of focus

1. Carbon Footprint: Total GHG emissions (CO2e)

2. Scope 1 Emissions: Direct emissions

3. Scope 2 Emissions: Indirect emissions from purchased energy

4. Scope 3 Emissions: Indirect emissions from value chain

5. Life Cycle Assessment (LCA): Full environmental impact analysis

6. Green Tech: Environmentally friendly technology

7. Circular Economy: Waste reduction through reuse and recycling

8. Energy Efficiency: Using less energy for the same output

9. Water Footprint: Total freshwater usage

10. Ultrapure Water (UPW): Highly purified water for fabs

11. PFAS: Persistent, harmful chemicals

12. Sustainable Packaging: Eco-friendly packaging

13. Renewable Energy: Replenishable energy sources

14. Carbon Neutrality: Balancing emissions with removal

15. ESG (Environmental, Social, Governance): Sustainability standards

16. Chiplet Technology: Modular chip design

17. Multi-Chip Module (MCM): Integrated circuit assemblies

18. High-NA EUV Lithography: Advanced wafer printing, a process currently in R&D

19. Manufacturing Carbon Module: Emissions calculation tool

20. Operational Efficiency: Optimizing processes for sustainability

21. E-waste: Electronic waste

22. Carbon Offsetting: Funding emissions reduction elsewhere

23. Sustainable Development Goals (SDGs): Global sustainability targets

24. Cradle-to-Grave Analysis: Full product lifecycle impact

25. Water Recycling: Reusing treated wastewater

26. Photolithography: Wafer patterning process

27. Chemically Amplified Resists (CARs): Light-sensitive materials

28. High Bandwidth Memory (HBM): High-performance memory

29. Silicon Intensity: Silicon usage in devices

30. Data Center Efficiency: Optimizing data center energy use

31. Process Node: Semiconductor manufacturing technology

32. Abatement: Emissions reduction actions

33. Carbon Intensity: Emissions per unit of output

34. Eco-design: Environmentally conscious product design

35. Reclamation: Restoring land or resources

36. Bioplastics: Plastics from renewable sources

37. Closed-Loop Recycling: Recycling into the same product

38. Supply Chain Transparency: Disclosure of supply chain impacts

39. Net-Zero Emissions: Balancing emissions with removal

40. Green Building: Sustainable construction

41. Sustainable Materials: Low-impact materials

42. Industrial Ecology: Studying industrial system interactions

43. Environmental Justice: Fair environmental treatment

44. Biodegradable: Decomposable by organisms

45. Carbon Capture and Storage (CCS): Capturing and storing CO2

46. Sustainable Investing: Investing in eco-friendly companies

47. Environmental Regulations: Protection laws

48. Impact Assessment: Evaluating project impacts

49. Resource Depletion: Over-consumption of resources

50. Greenwashing: Misleading environmental claims

51. Rare Earth Elements (REEs): Elements used in electronics

52. Extended Producer Responsibility (EPR): Producer's end-of-life responsibility

53. Hazardous Waste: Dangerous waste materials

54. Remanufacturing: Restoring products to like-new condition

55. Green Chemistry: Designing environmentally safe chemicals

56. Water Stewardship: Responsible water management

57. Eco-labeling: Certifying environmentally friendly products

58. Sustainable Consumption: Reducing consumption impacts

59. Biodiversity: Variety of life forms

60. Climate Resilience: Adapting to climate change impacts

61. Wafer Fabrication (Fab): Chip manufacturing facility

62. Die: Individual chip unit

63. Advanced Packaging: Interconnecting chips in complex ways

64. System-on-Chip (SoC): Integrated chip systems

65. Fan-Out Wafer Level Packaging (FOWLP): Advanced packaging technique

66. Through-Silicon Vias (TSVs): Vertical connections in chips

67. EUV Lithography: Extreme ultraviolet lithography

68. Gate-All-Around (GAA) FETs): Advanced transistor structure

69. Backside Power Delivery Networks (BSPD): Efficient power distribution

70. 3D NAND: Vertical memory chip stacking

71. DRAM: Dynamic random-access memory

72. Foundry: Semiconductor manufacturing service

73. Integrated Device Manufacturer (IDM): Company that designs and manufactures chips

74. Photoresist: Light-sensitive material in lithography

75. Metrology: Measurement and inspection

76. Epitaxy: Growing crystalline layers

77. Selective Etching: Removing specific materials

78. FinFET: Fin field-effect transistor

79. Reticle: Master template for wafer printing

80. Silicon Interposer: Substrate for chip interconnection

81. Corporate Sustainability Reporting Directive (CSRD): EU reporting standards

82. Task Force on Climate-related Financial Disclosures (TCFD): Climate risk reporting

83. Global Reporting Initiative (GRI): Sustainability reporting standards

84. Science Based Targets initiative (SBTi): Emissions reduction targets

85. Carbon Accounting: Measuring and reporting emissions

86. Decarbonization: Reducing carbon emissions

87. Sustainable Innovation: Developing eco-friendly technologies

88. Green Supply Chain: Environmentally responsible supply chain

89. Life Cycle Costing (LCC): Evaluating full product costs

90. Environmental Management System (EMS): Framework for managing environmental impacts

91. Stakeholder Engagement: Involving interested parties

92. Product Stewardship: Responsibility for product impacts

93. Climate Risk Assessment: Evaluating climate change risks

94. Regenerative Agriculture: Farming practices that restore ecosystems

95. Industrial Symbiosis: Resource sharing between industries

96. Smart Grids: Modernized electricity networks

97. Vehicle-to-Grid (V2G): Electric vehicle energy sharing

98. Distributed Energy Resources (DERs): Localized energy sources

99. Predictive Maintenance: Using data to prevent equipment failures

100. Digital Twin: Virtual representation of physical assets for optimization

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