2025-12-10 - Chamber Shipments

Critical subsystem chamber counts rose in Q3 2025, driven by strong demand for lithography, deposition, and etch tools across key applications.

This report reviews both top-line and segmented chambers for Critical subsystems (CSUBs) and breaks them down by industry, tool type, SEMI, FPD, and PV. We collect data throughout the year on public companies and analyze over 160 total companies that supply the subsystem market. Our analysis process combines historical data, econometric modeling, bottom-up and top-down analysis of the supply chain, industry interviews, and analyst expertise. This report focuses on yearly and quarterly chamber counts, which include lithography, CMP & ion implant, deposition, etch & clean, and substrate handling tool units.